WAFER STORAGE SYSTEM

A wafer storage system includes a main rail, an overhead hoist transport (OHT) on the main rail, the OHT being configured to transfer at least one storage case with wafers, an interface port on at least one side of the main rail, an auxiliary rail on one side of the interface port, the auxiliary rai...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BANG, Sanga, AHN, Yongjun, LEE, Sangkyung, PARK, Ginam, LEE, Hyunwoo, KIM, Youngwook, PARK, Chuljun, KIM, Sangmin, LIM, Jeonghun, KIM, Minji
Format:	Patent
Sprache:	eng
Schlagworte:	CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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