GAS DISTRIBUTION FACEPLATE WITH OBLIQUE FLOW PATHS

Gas distribution faceplates are disclosed that feature clusters of gas passages extending from inlet gas ports on a first side thereof to outlet gas ports on a second side thereof. The gas passages may each have at least a portion thereof that is at an oblique angle with respect to a nominal centerl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Bailey, III, Andrew D, Sermollo, Nebiyu Barsula, Tokairin, Shawn, Povolny, Henry Stephen, de la Llera, Anthony
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY NOZZLES PERFORMING OPERATIONS SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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