CARRIER TRANSPORT SYSTEM, VACUUM PROCESSING APPARATUS, AND METHOD OF TRANSPORTATION OF A CARRIER IN A VACUUM CHAMBER

A carrier transport system for transporting a carrier within a vacuum chamber is described. The carrier transport system includes a track assembly extending in a transport direction, the track assembly comprising: a first passive magnetic unit provided at a first vertical coordinate and extending in...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	EHMANN, Christian Wolfgang
Format:	Patent
Sprache:	eng
Schlagworte:	CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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