DEFECT INSPECTING SYSTEM AND DEFECT INSPECTING METHOD

A defect inspecting system includes a detector configured to image a sample and a host control device that acquires an inspection image including a defect and a plurality of reference images not including a defect site and generates a pseudo defect image by editing a predetermined reference image am...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HARADA, Minoru, KONDO, Naoaki, MINEKAWA, Yohei
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS
Online-Zugang:	Volltext bestellen
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