INTEGRATED CIRCUIT INCLUDING TEST CIRCUIT AND METHOD OF MANUFACTURING THE SAME

An integrated circuit includes first to nth metal layers vertically stacked on a substrate, and a test circuit outputting a test result signal according to a characteristic of each of the first to nth metal layers. The test circuit includes first to nth test circuits for generating a plurality of cl...

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Hauptverfasser:	Oh, Kwanghun, Han, Changho, Lim, Mijeong, Kim, Yuncheol
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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creator	Oh, Kwanghun Han, Changho Lim, Mijeong Kim, Yuncheol
description	An integrated circuit includes first to nth metal layers vertically stacked on a substrate, and a test circuit outputting a test result signal according to a characteristic of each of the first to nth metal layers. The test circuit includes first to nth test circuits for generating a plurality of clock signals. Each clock signal of the plurality of clock signal has a frequency according to a characteristic of a corresponding metal layer among the first to nth metal layers, and n is a natural number.
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subjects	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
title	INTEGRATED CIRCUIT INCLUDING TEST CIRCUIT AND METHOD OF MANUFACTURING THE SAME
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