INNER SURFACE SHAPE MEASUREMENT DEVICE, AND ALIGNMENT METHOD FOR INNER SURFACE SHAPE MEASUREMENT DEVICE

The following are observed using a camera: a first position of a small hole of a workpiece, which is fixed to a linear-and-tilting-motion stage and rotating with a rotating body, and a second position thereof different from the first position, at a first rotation angle of the rotating body; and the...

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Bibliographische Detailangaben

Hauptverfasser:	KIMURA, Hiroaki, MORII, Hideki, MORIYAMA, Katsufumi
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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