DEVICE FOR DETECTING A TEMPERATURE, INSTALLATION FOR PRODUCING AN OPTICAL ELEMENT AND METHOD FOR PRODUCING AN OPTICAL ELEMENT

A device (20) for detecting a temperature on a surface (15) of an optical element (14) for semiconductor lithography. The device includesan optical element (14) having a face (16) irradiated with electromagnetic radiation (7, 8, 43),a temperature recording device (21), anda temperature controlled el...

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Bibliographische Detailangaben

Hauptverfasser:	LAUFER, Timo, STOLZ, Michael
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY COLORIMETRY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS RADIATION PYROMETRY TESTING
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