METHOD OF FORMING AN OPTICAL APERTURE OF A VERTICAL CAVITY SURFACE EMITTING LASER AND VERTICAL CAVITY SURFACE EMITTING LASER

A method of forming an optical aperture of a vertical cavity surface emitting laser includes the steps of providing a layer stack of semiconductor layers, the semiconductor layers including an intermediate layer comprising a semiconductor material suitable to be oxidized and oxidizing the intermedia...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Tempeler, Jenny, Koerner, Roman
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY
Online-Zugang:	Volltext bestellen
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