SAMPLE OBSERVATION SYSTEM AND IMAGE PROCESSING METHOD

The invention provides a sample observation system including a scanning electron microscope and a calculator. The calculator: (1) acquires a plurality of images captured by the scanning electron microscope; (2) acquires, from the plurality of images, a learning defect image including a defect portio...

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Hauptverfasser:	KONDO, Naoaki, HARADA, Minoru, MINEKAWA, Yohei
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS
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creator	KONDO, Naoaki HARADA, Minoru MINEKAWA, Yohei
description	The invention provides a sample observation system including a scanning electron microscope and a calculator. The calculator: (1) acquires a plurality of images captured by the scanning electron microscope; (2) acquires, from the plurality of images, a learning defect image including a defect portion and a learning reference image not including the defect portion; (3) calculates estimation processing parameters by using the learning defect image and the learning reference image; (4) acquires an inspection defect image including a defect portion; and (5) estimates a pseudo reference image by using the estimation processing parameters and the inspection defect image.
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subjects	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS
title	SAMPLE OBSERVATION SYSTEM AND IMAGE PROCESSING METHOD
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