SEGMENTED MULTI-CHANNEL, BACKSIDE ILLUMINATED, SOLID STATE DETECTOR WITH A THROUGH-HOLE FOR DETECTING SECONDARY AND BACKSCATTERED ELECTRONS

A segmented detector device with backside illumination. The detector is able to collect and differentiate between secondary electrons and backscatter electrons. The detector includes a through-hole for passage of a primary electron beam. After hitting a sample, the reflected secondary and backscatte...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Gerling, John, Spallas, James, Muray, Lawrence, Brodie, Alan, Trimpl, Marcel
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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