BRAGG GRATING AND METHOD FOR MANUFACTURING THE SAME AND DISTRIBUTED FEEDBACK LASER DEVICE
A Bragg grating includes a lower waveguide layer, a middle waveguide layer disposed on the lower waveguide layer, an upper waveguide structure disposed on the middle waveguide layer opposite to the lower waveguide layer, and a buried layer. The upper waveguide structure includes upper waveguide elem...
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Sprache: | eng |
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Zusammenfassung: | A Bragg grating includes a lower waveguide layer, a middle waveguide layer disposed on the lower waveguide layer, an upper waveguide structure disposed on the middle waveguide layer opposite to the lower waveguide layer, and a buried layer. The upper waveguide structure includes upper waveguide elements that are arranged on a surface of the middle waveguide layer, and that are spaced apart from one another by cavities. The buried layer fills the cavity. The middle waveguide layer has a refractive index lower than that of each of the lower waveguide layer and the upper waveguide elements. The lower waveguide layer has a doping type the same as that of the middle waveguide layer. A method for manufacturing the Bragg grating is also provided. |
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