MULTI-LAYER PELLICLE MEMBRANE

A pellicle assembly includes a pellicle membrane and a conformal coating on an outer surface of the pellicle membrane. The pellicle membrane can be formed with multiple layers and has a combination of high transmittance, low deflection, and small pore size. The conformal coating is intended to prote...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Gau, Tsai-Sheng, Lee, Hsin-Chang, Lien, Ta-Cheng, Hsu, Pei-Cheng, Lin, Chin-Hsiang
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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