Charged Particle Beam System

An object of the invention is to acquire a high-quality image while maintaining an improvement in throughput of image acquisition (measurement (length measurement)). The present disclosure provides a charged particle beam system including a charged particle beam device and a computer system configur...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OHASHI, Takeyoshi, TANIMOTO, Kenji, ABE, Yusuke, NAKAMURA, Yusuke
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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