RADIO FREQUENCY POWER GENERATOR HAVING MULTIPLE OUTPUT PORTS

RADIO FREQUENCY POWER GENERATOR HAVING MULTIPLE OUTPUT PORTS

A radio frequency (RF) power generator adapted for coupling to a multi-station integrated circuit fabrication chamber may include an oscillator to provide a periodic signal and one or more preamplifiers each having an input port to receive a signal from the oscillator and having an output port to pr...

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1. Verfasser: Kapoor, Sunil
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
BASIC ELECTRONIC CIRCUITRY
CONTROL OF AMPLIFICATION
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator Kapoor, Sunil
description A radio frequency (RF) power generator adapted for coupling to a multi-station integrated circuit fabrication chamber may include an oscillator to provide a periodic signal and one or more preamplifiers each having an input port to receive a signal from the oscillator and having an output port to provide an amplified signal. The RF generator may additionally include one or more constant-gain amplifiers, each having an input port to receive a signal from the one or more preamplifiers, and an output port configured for coupling an amplified signal to an electrode for generating a plasma in an assigned station of the multi-station integrated circuit fabrication chamber.
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subjects BASIC ELECTRIC ELEMENTS
BASIC ELECTRONIC CIRCUITRY
CONTROL OF AMPLIFICATION
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title RADIO FREQUENCY POWER GENERATOR HAVING MULTIPLE OUTPUT PORTS
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