APPARATUS FOR CONTROLLING LIFT PIN MOVEMENT

Embodiments of the present disclosure generally relate to lift pins and to apparatus for controlling lift pin movement. In an embodiment, an apparatus for positioning a substrate in a chamber is provided. The apparatus includes a chamber component, a lift pin having a top surface for supporting the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BREZOCZKY, Thomas, PRASAD, Bhaskar, SATYAVOLU, Nitin Bharadwaj, SAVANDAIAH, Kirankumar Neelasandra, SRIVASTAVA, Anubhav
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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