METHODS, SYSTEMS, AND APPARATUS FOR OPTICALLY MONITORING INDIVIDUAL LAMPS
Methods, systems, and apparatus provide for optically monitoring individual lamps of substrate processing chambers. In one aspect, the individual lamps are monitored to determine if one or more lamps are in need of replacement. A method includes using one or more camera coupled to a borescope to cap...
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creator | HOWELLS, Samuel C NESTOROV, Vilen K PRASAD, Chaitanya Anjaneyalu IU, Dongming HU, Ji-Dih |
description | Methods, systems, and apparatus provide for optically monitoring individual lamps of substrate processing chambers. In one aspect, the individual lamps are monitored to determine if one or more lamps are in need of replacement. A method includes using one or more camera coupled to a borescope to capture a plurality of images of one or more lamps in a substrate processing chamber. The plurality of images is analyzed to identify a change of mean light pixel intensity in an image reference region associated with each lamp. The method includes generating an alert based on the detection of the mean light pixel intensity change. |
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fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2022301904A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2022301904A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2022301904A13</originalsourceid><addsrcrecordid>eNrjZPD0dQ3x8HcJ1lEIjgwOcfUFMhz9XBQcAwIcgxxDQoMV3PyDFPwDQjydHX18IhV8_f08Q_yDPP3cFTz9XDzDPF1CHX0UfBx9A4J5GFjTEnOKU3mhNDeDsptriLOHbmpBfnxqcUFicmpeakl8aLCRgZGRsYGhpYGJo6ExcaoAAewuPg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>METHODS, SYSTEMS, AND APPARATUS FOR OPTICALLY MONITORING INDIVIDUAL LAMPS</title><source>esp@cenet</source><creator>HOWELLS, Samuel C ; NESTOROV, Vilen K ; PRASAD, Chaitanya Anjaneyalu ; IU, Dongming ; HU, Ji-Dih</creator><creatorcontrib>HOWELLS, Samuel C ; NESTOROV, Vilen K ; PRASAD, Chaitanya Anjaneyalu ; IU, Dongming ; HU, Ji-Dih</creatorcontrib><description>Methods, systems, and apparatus provide for optically monitoring individual lamps of substrate processing chambers. In one aspect, the individual lamps are monitored to determine if one or more lamps are in need of replacement. A method includes using one or more camera coupled to a borescope to capture a plurality of images of one or more lamps in a substrate processing chamber. The plurality of images is analyzed to identify a change of mean light pixel intensity in an image reference region associated with each lamp. The method includes generating an alert based on the detection of the mean light pixel intensity change.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC HEATING ; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220922&DB=EPODOC&CC=US&NR=2022301904A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25569,76552</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220922&DB=EPODOC&CC=US&NR=2022301904A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HOWELLS, Samuel C</creatorcontrib><creatorcontrib>NESTOROV, Vilen K</creatorcontrib><creatorcontrib>PRASAD, Chaitanya Anjaneyalu</creatorcontrib><creatorcontrib>IU, Dongming</creatorcontrib><creatorcontrib>HU, Ji-Dih</creatorcontrib><title>METHODS, SYSTEMS, AND APPARATUS FOR OPTICALLY MONITORING INDIVIDUAL LAMPS</title><description>Methods, systems, and apparatus provide for optically monitoring individual lamps of substrate processing chambers. In one aspect, the individual lamps are monitored to determine if one or more lamps are in need of replacement. A method includes using one or more camera coupled to a borescope to capture a plurality of images of one or more lamps in a substrate processing chamber. The plurality of images is analyzed to identify a change of mean light pixel intensity in an image reference region associated with each lamp. The method includes generating an alert based on the detection of the mean light pixel intensity change.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC HEATING</subject><subject>ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPD0dQ3x8HcJ1lEIjgwOcfUFMhz9XBQcAwIcgxxDQoMV3PyDFPwDQjydHX18IhV8_f08Q_yDPP3cFTz9XDzDPF1CHX0UfBx9A4J5GFjTEnOKU3mhNDeDsptriLOHbmpBfnxqcUFicmpeakl8aLCRgZGRsYGhpYGJo6ExcaoAAewuPg</recordid><startdate>20220922</startdate><enddate>20220922</enddate><creator>HOWELLS, Samuel C</creator><creator>NESTOROV, Vilen K</creator><creator>PRASAD, Chaitanya Anjaneyalu</creator><creator>IU, Dongming</creator><creator>HU, Ji-Dih</creator><scope>EVB</scope></search><sort><creationdate>20220922</creationdate><title>METHODS, SYSTEMS, AND APPARATUS FOR OPTICALLY MONITORING INDIVIDUAL LAMPS</title><author>HOWELLS, Samuel C ; NESTOROV, Vilen K ; PRASAD, Chaitanya Anjaneyalu ; IU, Dongming ; HU, Ji-Dih</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2022301904A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2022</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC HEATING</topic><topic>ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>HOWELLS, Samuel C</creatorcontrib><creatorcontrib>NESTOROV, Vilen K</creatorcontrib><creatorcontrib>PRASAD, Chaitanya Anjaneyalu</creatorcontrib><creatorcontrib>IU, Dongming</creatorcontrib><creatorcontrib>HU, Ji-Dih</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HOWELLS, Samuel C</au><au>NESTOROV, Vilen K</au><au>PRASAD, Chaitanya Anjaneyalu</au><au>IU, Dongming</au><au>HU, Ji-Dih</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>METHODS, SYSTEMS, AND APPARATUS FOR OPTICALLY MONITORING INDIVIDUAL LAMPS</title><date>2022-09-22</date><risdate>2022</risdate><abstract>Methods, systems, and apparatus provide for optically monitoring individual lamps of substrate processing chambers. In one aspect, the individual lamps are monitored to determine if one or more lamps are in need of replacement. A method includes using one or more camera coupled to a borescope to capture a plurality of images of one or more lamps in a substrate processing chamber. The plurality of images is analyzed to identify a change of mean light pixel intensity in an image reference region associated with each lamp. The method includes generating an alert based on the detection of the mean light pixel intensity change.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
title | METHODS, SYSTEMS, AND APPARATUS FOR OPTICALLY MONITORING INDIVIDUAL LAMPS |
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