METHODS, SYSTEMS, AND APPARATUS FOR OPTICALLY MONITORING INDIVIDUAL LAMPS

METHODS, SYSTEMS, AND APPARATUS FOR OPTICALLY MONITORING INDIVIDUAL LAMPS

Methods, systems, and apparatus provide for optically monitoring individual lamps of substrate processing chambers. In one aspect, the individual lamps are monitored to determine if one or more lamps are in need of replacement. A method includes using one or more camera coupled to a borescope to cap...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HOWELLS, Samuel C, NESTOROV, Vilen K, PRASAD, Chaitanya Anjaneyalu, IU, Dongming, HU, Ji-Dih
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Methods, systems, and apparatus provide for optically monitoring individual lamps of substrate processing chambers. In one aspect, the individual lamps are monitored to determine if one or more lamps are in need of replacement. A method includes using one or more camera coupled to a borescope to capture a plurality of images of one or more lamps in a substrate processing chamber. The plurality of images is analyzed to identify a change of mean light pixel intensity in an image reference region associated with each lamp. The method includes generating an alert based on the detection of the mean light pixel intensity change.