SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME, AND SEMICONDUCTOR DEVICE

A mold die includes a resin injection gate through which fluid resin serving as mold resin is injected toward a cavity, a resin reservoir to store the fluid resin flowing through the cavity, and a resin reservoir gate. The resin reservoir is provided on the side opposite to the side on which the res...

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Bibliographische Detailangaben
Hauptverfasser: SHIRAO, Akitoshi, SUZUKI, Yuichiro, IWAI, Takamasa, FUJINO, Junji, KOSUGI, Akira
Format: Patent
Sprache:eng
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