SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

According to one embodiment, a semiconductor device includes a circuit pattern including a plurality of unit patterns that are disposed in a repeating manner in at least one direction. The semiconductor device includes a discrimination pattern provided in the circuit pattern and configured to discri...

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Bibliographische Detailangaben
Hauptverfasser: TAKAHASHI, Yoshiaki, OZAWA, Toru, KOSAKI, Takumi, NAKAO, Kouji, MIZUTA, Yoichi, MATOBA, Kenichi, SHIMAMURA, Yoshifumi, TSURUDO, Takahiro
Format: Patent
Sprache:eng
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Zusammenfassung:According to one embodiment, a semiconductor device includes a circuit pattern including a plurality of unit patterns that are disposed in a repeating manner in at least one direction. The semiconductor device includes a discrimination pattern provided in the circuit pattern and configured to discriminate the unit patterns from each other.