Silicon Core Wire for Depositing Polycrystalline Silicon and Production Method Therefor

A silicon core wire for depositing polycrystalline silicon is formed in a gate shape and includes a pair of vertical rod portions and a horizontal portion laterally connecting upper ends of the vertical rod portions, in which ends of the vertical rod portions and the horizontal portion are joined by...

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Bibliographische Detailangaben
Hauptverfasser: Katou, Seiji, Emoto, Miki, Kamada, Makoto, Sakai, Junya
Format: Patent
Sprache:eng
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