ADVANCED LITHOGRAPHY AND SELF-ASSEMBLED DEVICES

Advanced lithography techniques including sub-10 nm pitch patterning and structures resulting therefrom are described. Self-assembled devices and their methods of fabrication are described.

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Bibliographische Detailangaben
Hauptverfasser:	BRISTOL, Robert L, CHANDHOK, Manish, WALLACE, Charles H, GSTREIN, Florian, BLACKWELL, James M, NYHUS, Paul A, TAN, Elliot N, LIN, Kevin L, KRYSAK, Marie, SIVAKUMAR, Swaminathan, WARD, Curtis W, SCHENKER, Richard E
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	Advanced lithography techniques including sub-10 nm pitch patterning and structures resulting therefrom are described. Self-assembled devices and their methods of fabrication are described.