SYSTEMS AND METHODS FOR COMPENSATING FOR RF POWER LOSS

Systems and methods for compensating for radio frequency (RF) power loss are described. One of the methods includes conducting a no plasma test to determine a resistance associated with an output of an impedance matching circuit. After conducting the no plasma test, a substrate is processed in a pla...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Flowers, Cristofer Addison, Drewery, John, Evans, Mathew Dennis
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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