MONOLITHIC GAS-SENSING CHIP ASSEMBLY AND METHOD

A monolithic gas-sensing chip assembly for sensing a gas analyte includes a sensing material to detect the gas analyte, a sensing system including a resistor-capacitor electrical circuit, and a heating element. A sensing circuit measures an electrical response of the sensing system to an alternating...

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Bibliographische Detailangaben
Hauptverfasser: Andarawis, Emad Andarawis, Rao, Naresh Kesavan, Potyrailo, Radislav Alexandrovich
Format: Patent
Sprache:eng
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