THERMAL SENSOR DEVICE

A thermal sensor device capable of maintaining measurement accuracy for a long period by suppressing plastic deformation due to thermal expansion of the heat generating resistor and reducing resistance change of the heat generating resistor, includes: a substrate having an opening; and a diaphragm h...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAKANO, Hiroshi, MATSUMOTO, Masahiro, ONOSE, Yasuo, OHTA, Kazuhiro
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TESTING
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