HIGH RELIABILITY POLYSILICON COMPONENTS

The present disclosure introduces, among other things, an electronic device, e.g. an integrated circuit (IC). The IC includes a semiconductor substrate comprising a first doped layer of a first conductivity type. A second doped layer of the first conductivity type is located within the first doped l...

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Hauptverfasser: Higgins, Robert M, Arshad, Shariq, Edwards, Henry Litzmann, Wu, Xiaoju, Wang, Li, Davis, Jonathan Philip, Chatterjee, Tathagata
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creator Higgins, Robert M
Arshad, Shariq
Edwards, Henry Litzmann
Wu, Xiaoju
Wang, Li
Davis, Jonathan Philip
Chatterjee, Tathagata
description The present disclosure introduces, among other things, an electronic device, e.g. an integrated circuit (IC). The IC includes a semiconductor substrate comprising a first doped layer of a first conductivity type. A second doped layer of the first conductivity type is located within the first doped layer. The second doped layer has first and second layer portions with a greater dopant concentration than the first doped layer, with the first layer portion being spaced apart from the second layer portion laterally with respect to a surface of the substrate. The IC further includes a lightly doped portion of the first doped layer, the lightly doped portion being located between the first and second layer portions. A dielectric isolation structure is located between the first and second layer portions, and directly contacts the lightly doped portion.
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subjects BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PHYSICS
SEMICONDUCTOR DEVICES
title HIGH RELIABILITY POLYSILICON COMPONENTS
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