Computer System of Observation Device and Processing Method

As a technology for an observation device and an inspection device, a technology capable of reducing a work effort related to generation of a recipe including alignment information is provided. An observation device 1 includes an observation unit 103 that obtains an image for observing a sample 101...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MATSUMOTO, Kosuke, Nakayama, Hideki, Miyake, Kozo, Fukuda, Miyuki, Isomae, Yuya, Takada, Satoshi
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!