Computer System of Observation Device and Processing Method
As a technology for an observation device and an inspection device, a technology capable of reducing a work effort related to generation of a recipe including alignment information is provided. An observation device 1 includes an observation unit 103 that obtains an image for observing a sample 101...
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| creator | MATSUMOTO, Kosuke Nakayama, Hideki Miyake, Kozo Fukuda, Miyuki Isomae, Yuya Takada, Satoshi |
| description | As a technology for an observation device and an inspection device, a technology capable of reducing a work effort related to generation of a recipe including alignment information is provided. An observation device 1 includes an observation unit 103 that obtains an image for observing a sample 101 on a stage 102. A computer system 2 of the observation device 1 acquires the image from the observation unit 103, specifies a period of a pattern-formed unit region repeatedly formed on a surface of the sample 101 from the image, and generates a recipe including observation or inspection alignment positions of the sample 101 using the specified period. |
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| subjects | CALCULATING COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING |
| title | Computer System of Observation Device and Processing Method |
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