OPTICAL END-POINTING FOR INTEGRATED CIRCUIT DELAYERING; SYSTEMS AND METHODS USING THE SAME

Systems for determining an end-point of a delayering process using optical end-point detection are described. In embodiments, the systems include a controller with an optical end-pointing (OE) module that is configured to determine an end-point of a delayering process based at least in part on the c...

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Bibliographische Detailangaben

Hauptverfasser:	Baur, Joshua, Darby, Nicholas, Scholl, Jonathan
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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