PIEZOELECTRIC ELEMENT

A piezoelectric element 10 includes a lower electrode, constituted of a Pt/Ti laminated film, a PLT seed layer, formed on the lower electrode, a PZT piezoelectric film, formed on the PLT seed layer, and an upper electrode, formed on the PZT piezoelectric film. A curve Q1 is a curve drawn such as to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MATSUO, Nobufumi, DATE, Tomohiro, NOMURA, Koji
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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