GRINDING APPARATUS

A grinding apparatus includes a chuck table that holds under suction a workpiece through a protective tape, where the protective tape is attached to one surface of an annular frame so as to cover an opening of the annular frame and the workpiece is attached to the protective tape on an inner side th...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	HOSHIKAWA, Hirotoshi
Format:	Patent
Sprache:	eng
Schlagworte:	CLEANING CLEANING IN GENERAL DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING PREVENTION OF FOULING IN GENERAL TRANSPORTING
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