CONDUCTIVE FEATURES HAVING VARYING RESISTANCE

Methods to form vertically conducting and laterally conducting low-cost resistor structures utilizing dual-resistivity conductive materials are provided. The dual-resistivity conductive materials are deposited in openings in a dielectric layer using a single deposition process step. A high-resistivi...

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Bibliographische Detailangaben

Hauptverfasser:	Chang, Feng-Yu, Lee, Jia-En, Lin, Shih-Che, Wang, Chao-Hsun, Chao, Kuo-Yi, Huang, Po-Yu, Wang, Mei-Yun
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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