TEMPERATURE SENSOR, HEATER UNIT, AND SUBSTRATE PROCESSING APPARATUS

TEMPERATURE SENSOR, HEATER UNIT, AND SUBSTRATE PROCESSING APPARATUS

There is provided a configuration installed on a mount provided with an opening, that includes a main body connected to the mount to penetrate the opening while providing a micro space; a first positioner attached to a side of a leading end portion of the main body with respect to the mount; and a s...

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Hauptverfasser: AKAO, Tokunobu, KOSUGI, Tetsuya
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CONTROLLING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PHYSICS
REGULATING
SEMICONDUCTOR DEVICES
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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creator AKAO, Tokunobu
KOSUGI, Tetsuya
description There is provided a configuration installed on a mount provided with an opening, that includes a main body connected to the mount to penetrate the opening while providing a micro space; a first positioner attached to a side of a leading end portion of the main body with respect to the mount; and a second positioner attached to a side of a tail end portion of the main body with respect to the mount, wherein the main body is movable within a range determined by the micro space, the first positioner, and the second positioner.
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subjects BASIC ELECTRIC ELEMENTS
CONTROLLING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PHYSICS
REGULATING
SEMICONDUCTOR DEVICES
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
title TEMPERATURE SENSOR, HEATER UNIT, AND SUBSTRATE PROCESSING APPARATUS
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