GRATING COUPLERS INTEGRATED WITH ONE OR MORE AIRGAPS

GRATING COUPLERS INTEGRATED WITH ONE OR MORE AIRGAPS

The present disclosure relates to semiconductor structures and, more particularly, to grating couplers integrated with one or more airgap and methods of manufacture. The structure includes: a substrate material comprising one or more airgaps; and a grating coupler disposed over the substrate materia...

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Hauptverfasser: GIEWONT, Kenneth J, ADUSUMILLI, Siva P, PENG, Bo, BIAN, Yusheng
Format: Patent
Sprache:eng
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OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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creator GIEWONT, Kenneth J
ADUSUMILLI, Siva P
PENG, Bo
BIAN, Yusheng
description The present disclosure relates to semiconductor structures and, more particularly, to grating couplers integrated with one or more airgap and methods of manufacture. The structure includes: a substrate material comprising one or more airgaps; and a grating coupler disposed over the substrate material and the one or more airgaps.
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subjects OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
title GRATING COUPLERS INTEGRATED WITH ONE OR MORE AIRGAPS
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