FIXTURE FOR AUTOMATIC CALIBRATION OF SUBSTRATE TRANSFER ROBOT

A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A contr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	THAULAD, Peter, BLANK, Richard, BEHZIZ, Behnam, ALWAN, Aravind, EMERSON, Mark E
Format:	Patent
Sprache:	eng
Schlagworte:	CHAMBERS PROVIDED WITH MANIPULATION DEVICES HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!