SEMICONDUCTOR PROCESSING CHAMBER ARCHITECTURE FOR HIGHER THROUGHPUT AND FASTER TRANSITION TIME

Exemplary substrate processing systems may include a chamber body defining a transfer region. The systems may include a lid plate seated on the chamber body along a first surface of the lid plate. The lid plate may define a plurality of apertures through the lid plate. The lid plate may further defi...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Kalsekar, Viren
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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