WAFER REGISTRATION AND OVERLAY MEASUREMENT SYSTEMS AND RELATED METHODS

A method for measuring overlay between an interest level and a reference level of a wafer includes applying a magnetic field to a wafer, detecting at least one residual magnetic field emitted from at least one registration marker of a first set of registration markers within the wafer, responsive to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Housley, Richard T, Dembi, Robert, Mirin, Nikolay A, Zhang, Xiaosong, Kramer, Stephen J, Harms, Jonathan D
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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