DIFFERENTIAL PRESSURE SENSOR AND METHOD OF USING THE SAME

Various embodiments are directed to a pressure sensor and method of using the same. A pressure sensor may comprise a substrate having a substrate thickness extending between a first substrate surface and a second substrate surface, wherein the first substrate surface and the second substrate surface...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Sreeramu, Sudheer Beligere, B, Manjesh Kumar, Vadlamudi, Sathish
Format: Patent
Sprache:eng
Schlagworte:
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