SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES

An exemplary semiconductor device can comprise (a) a substrate comprising a substrate dielectric structure between the substrate top side and the substrate bottom side, conductive pads at the substrate bottom side, and a substrate cavity through the substrate dielectric structure, (b) a base electro...

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Bibliographische Detailangaben
Hauptverfasser: Cho, Sang Hyeok, Huemoeller, Ron, Ma, Sang Yun, Cha, Hyun Goo, Kang, Dong Hee, Bae, Jae Yeong
Format: Patent
Sprache:eng
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