INTEGRATED STRUCTURE OF CRYSTAL RESONATOR AND CONTROL CIRCUIT AND INTEGRATION METHOD THEREFOR

An integrated structure of crystal resonator and control circuit and an integration method therefor. The crystal resonator is formed by first forming the lower cavity (120) in the device wafer (100) containing the control circuit (110), forming the piezoelectric vibrator (200) on the device wafer (1...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	QIN, Xiaoshan
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!