System And Technique For Profile Modulation Using High Tilt Angles

A system and method that allows higher energy implants to be performed, wherein the peak concentration depth is shallower than would otherwise occur is disclosed. The system comprises an ion source, an accelerator, a platen and a platen orientation motor that allows large tilt angles. The system may...

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Bibliographische Detailangaben

Hauptverfasser:	Arevalo, Edwin, Prasad, Rajesh, Shim, KyuHa, Falk, Scott, Chavva, Venkataramana R, Gossmann, Hans
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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