GATE MATERIAL-BASED CAPACITOR AND RESISTOR STRUCTURES AND METHODS OF FORMING THE SAME

At least one of a capacitor or a resistor structure can be formed concurrently with formation of a field effect transistor by patterning a gate dielectric layer into gate dielectric and into a first node dielectric or a first resistor isolation dielectric, and by patterning a semiconductor layer int...

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Bibliographische Detailangaben
Hauptverfasser: IWATA, Dai, TOGO, Mitsuhiro, OGAWA, Hiroyuki, KODATE, Hokuto
Format: Patent
Sprache:eng
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