BULK-ACOUSTIC WAVE RESONATOR AND METHOD FOR FABRICATING A BULK-ACOUSTIC WAVE RESONATOR

BULK-ACOUSTIC WAVE RESONATOR AND METHOD FOR FABRICATING A BULK-ACOUSTIC WAVE RESONATOR

A bulk-acoustic wave resonator includes a resonator having a central portion in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, and an extension portion disposed along a periphery of the central portion and in which an insertion layer i...

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Hauptverfasser: SHIN, Ran Hee, YOON, Sang Kee, SON, Jin Suk, LEE, Tae Kyung, KIM, Yong Suk
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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creator SHIN, Ran Hee
YOON, Sang Kee
SON, Jin Suk
LEE, Tae Kyung
KIM, Yong Suk
description A bulk-acoustic wave resonator includes a resonator having a central portion in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, and an extension portion disposed along a periphery of the central portion and in which an insertion layer is disposed below the piezoelectric layer, wherein the insertion layer includes a SiO2 thin film injected with fluorine (F).
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subjects BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
title BULK-ACOUSTIC WAVE RESONATOR AND METHOD FOR FABRICATING A BULK-ACOUSTIC WAVE RESONATOR
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