APPARATUS AND METHODS FOR ENHANCED MICROELECTRONIC DEVICE HANDLING

This patent application relates to apparatus and methods for enhanced microelectronic device handling. Apparatus comprises a pick arm having a pick surface configured for receiving a microelectronic device thereon, drives for moving the pick arm and reorienting the pick surface in the X, Y and Z pla...

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Hauptverfasser: Tseng, Kuan Wei, Wirz, Brandon P
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creator Tseng, Kuan Wei
Wirz, Brandon P
description This patent application relates to apparatus and methods for enhanced microelectronic device handling. Apparatus comprises a pick arm having a pick surface configured for receiving a microelectronic device thereon, drives for moving the pick arm and reorienting the pick surface in the X, Y and Z planes and about a horizontal rotational axis and a vertical rotational axis, and a sensor device carried by the pick arm and configured to detect at least one of at least one magnitude of force and at least one location of force applied between the pick surface and a structure contacted by the pick surface or a structure and a microelectronic device carried on the pick surface. Related methods are also disclosed.
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subjects CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
PRINTED CIRCUITS
TRANSPORTING
title APPARATUS AND METHODS FOR ENHANCED MICROELECTRONIC DEVICE HANDLING
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