METHOD FOR PRODUCING A LITHOGRAPHY COATING FILM FORMING-COMPOSITION

A method for producing an ion-exchange resin having a water content of 5% by weight or less, a method for producing a lithography coating film forming-composition using the ion-exchange resin, and a method for washing the ion-exchange resin. The methods include the step of passing an organic solvent...

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Bibliographische Detailangaben
Hauptverfasser: SASSA, Suguru, OYA, Takumi, YAMAGUCHI, Hiroki
Format: Patent
Sprache:eng
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