METHOD FOR OPERATING A MEMS SYSTEM, AND MEMS SYSTEM

METHOD FOR OPERATING A MEMS SYSTEM, AND MEMS SYSTEM

A method for operating a MEMS system having a projection unit for providing an image via a light beam, and a deflecting unit for the two-dimensional deflection of the at least one light beam. The method includes: driving the deflecting unit via a reference signal, so that the deflecting unit periodi...

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Hauptverfasser: Gering, Stefan, Petersen, Andreas, Schuster, Florian
Format: Patent
Sprache:eng
Schlagworte:
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
PICTORIAL COMMUNICATION, e.g. TELEVISION
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creator Gering, Stefan
Petersen, Andreas
Schuster, Florian
description A method for operating a MEMS system having a projection unit for providing an image via a light beam, and a deflecting unit for the two-dimensional deflection of the at least one light beam. The method includes: driving the deflecting unit via a reference signal, so that the deflecting unit periodically deflects a light beam at least two-dimensionally, measuring a controlled variable of the deflecting unit that corresponds to an actual position of the deflected light beam, ascertaining a current deviation of the controlled variable from a target variable that corresponds to a target position of the light beam, calculating a compensating variable based on the ascertained deviation, controlling the deflecting unit and/or controlling the projection unit based on the calculated compensating variable for reducing the deviation of the light beam from the target position. The compensating variable is additionally calculated based on an earlier deviation in an earlier period.
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subjects ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
PICTORIAL COMMUNICATION, e.g. TELEVISION
title METHOD FOR OPERATING A MEMS SYSTEM, AND MEMS SYSTEM
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