NON-VOLATILE STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME

In a non-volatile storage device, a first lower-layer metal wire, a lower plug, a variable resistance element, an upper plug, and a first upper-layer metal wire are formed in that order from below in a storage region, and a second lower-layer metal wire, a first via, a middle-layer metal wire, a sec...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HIMENO, Atsushi, KAWASHIMA, Koichi, YASUHARA, Ryutaro, HAYAKAWA, Yukio
Format: Patent
Sprache:eng
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