PRESSURE SENSOR

A pressure sensor includes a diaphragm on a silicon substrate and a plurality of piezoelectric element areas that change in resistance according the distortion of the diaphragm. The plurality of piezoelectric element areas of the pressure sensor include a first piezoelectric element area, a second p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Takahashi, Toru, Yazawa, Hisayuki, Okawa, Hisanobu, Ishizone, Masahiko, Otsuka, Ayako
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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