STAGE APPARATUS

The present disclosure relates to a stage apparatus comprising: an object table configured to hold a substrate, the object table comprising an electrode configured to be charged by a power source and an electrical connection configured to electrically connect the electrode to the power source, and a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN DER TOORN, Jan-Gerard Cornelis, VISSERS, Paulus Martinus Hubertus
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY GENERATION INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINEDOPTICAL AND ELECTRIC CABLES OR LINES
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