INCIDENT AXIS ALIGNMENT METHOD FOR ELECTRON GUN EQUIPPED WITH PHOTOCATHODE, COMPUTER PROGRAM, AND ELECTRON GUN EQUIPPED WITH PHOTOCATHODE

The present invention addresses the problem of providing a method for automatically adjusting an electron beam emitted from an electron gun equipped with a photocathode to the incident axis of an electron optical system.[Solution] An incident axis alignment method for an electron gun equipped with a...

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Bibliographische Detailangaben
Hauptverfasser: Shikano, Haruka, Koizumi, Atsushi, Watanabe, Reiki, Nishitani, Tomohiro
Format: Patent
Sprache:eng
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