ELECTROMECHANICAL TRANSDUCER AND METHOD FOR MANUFACTURING SAME
Provided are an electromechanical transducer including a light movable member that is easy to move and charged portions whose amount of electrostatic charge does not substantially change over time and a method for manufacturing such an electromechanical transducer. The electromechanical transducer u...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Provided are an electromechanical transducer including a light movable member that is easy to move and charged portions whose amount of electrostatic charge does not substantially change over time and a method for manufacturing such an electromechanical transducer. The electromechanical transducer using electrostatic interaction between a charged portion and a counter electrode to perform transduction between electric power and motive power includes a fixed substrate, a movable member being movable with a predetermined distance maintained between the fixed substrate and the movable member, the movable member having grooves in a surface facing the fixed substrate, the grooves being formed at intervals in a moving direction of the movable member, charged portions formed on the surface of the movable member so as to alternate with the grooves; counter electrodes disposed on a surface of the fixed substrate in the moving direction, the surface facing the movable member, and a cover layer containing copper and covering at least side walls of the movable member inside the grooves. |
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